Excimer Lasers – Reliability and Higher Power Are Key Product Trends
نویسندگان
چکیده
منابع مشابه
Excimer Lasers in Medicine
Introduction Excimer lasers emit light energy, short optical pulses at ultraviolet wavelengths, that results in a unique laser tissue interaction. This has led to an increasing number of studies into medical applications of these lasers in fields such as ophthalmology, urology, cardiology and neurology. The typical excimer laser is operated with a combination of a halogen (fluorine or chlorine)...
متن کاملDischarge technology for excimer lasers of high average power
The self-sustained discharge of excimers is analyzed. Several excitation schemes that have been successfully applied are compared. For high repetition rate operation not only the discharge stability and its efficiency are important selection criteria but more important is the potential of fast discharge switching with minimum pulse energy. Pulse compression plays a key role in the laser perform...
متن کاملDeep-UV Excimer Lasers
The recent trend in microelectronics towards patterning critical feature sizes of 0.25 m and below has motivated the development of microlithography at the deep ultra-violet (DUV) laser wavelengths of 248 and 1 93 nm. In recent years the performance, reliability, and cost of ownership of excimer light sources have improved. Some key technologies needed for excimer lasers in microlithography inc...
متن کاملHigh Reliability of High Power and High Brightness Diode Lasers
We report on continued progress in the development of high power and high brightness single emitter laser diodes from 790 nm to 980 nm for reliable use in industrial and pumping applications. High performance has been demonstrated in nLIGHT’s diode laser technology in this spectral range with corresponding peak electrical-to-optical power conversion efficiency of ~65%. These pumps have been inc...
متن کاملExcimer lasers—40 never looked better
The first commercial excimer laser was introduced 40 years ago by Lambda Physik (now Coherent; Santa Clara, CA). Interestingly, its developers— Bernd Steyer and Dirk Basting—were both chemists whose main goal was to develop a light source for photochemistry and dye laser pumping. As soon as excimer lasers entered the market, Lambda Physik began to investigate other possible uses for a powerful ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Laser Technik Journal
سال: 2007
ISSN: 1613-7728,1863-9119
DOI: 10.1002/latj.200790162